Typical specifications for EPI polished wafers for GaN deposited LED's and other applications
| C-plane (0001) orientation: | ±0.25 degrees | Special ±0.1 degrees |
| Primary flat A-axis: | ±0.5 degrees | Special ±0.3 degrees |
| Secondary flat (if required): | 90 degrees CCW to Primary | |
| Front surface: | EPI polished (less than 5 Angstroms) | |
| Back surface: | Fine grind or polished | |
| Diameter |
2 in. (50.8 mm) |
2 in. (50.8 mm) |
3 in. (76.2 mm) |
|---|---|---|---|
| Dia. tol. | ±0.010 in. | ±0.010 in. | ±0.010 in. |
| Thickness | 0.330 mm | 0.430 mm | 0.430 mm |
| Thk. tol. | ±0.025 mm | ±0.025 mm | ±0.025 mm |
| Flatness | 0.025 mm | 0.025 mm | 0.025 mm |
| Bow | 0.025 mm | 0.025 mm | 0.025 mm |
| Taper-TTV | 0.025 mm | 0.025 mm | 0.025 mm |
| Primary Flat | 16 mm | 16 mm | 22 mm |
| Flat tol | ±1 mm | ±1 mm | ±1 mm |
Return to Home Page: Sapphire wafers and sapphire substrates
Dicing Disco Dicing Sapphire SOS Sapphire
Sales and Customer Service |
Site Map |
Corporate Headquarters |
|
Valley Design West 151-D Harvey West Blvd. Santa Cruz, CA 95060 |
Affiliate Sites |
Valley Design East Two Shaker Road, Bldg. E-001 Shirley, MA 01464 |
|
West E-mail:
west@sapphirewafers.com Germany Sales: germany@valleydesign.com France Sales: france@valleydesign.com Phone: 831.420.0595 Fax: 831.420.0592 |
East E-mail:
east@sapphirewafers.com Germany Sales: germany@valleydesign.com France Sales: france@valleydesign.com Phone: 978.425.3030 Fax: 978.425.3031 |
| Return to top of page |
|
Updated: 3 June 2008 |
| © 2008 Valley Design Corp. All Rights Reserved | ||