Polished R-plane Sapphire Wafers for SOS

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Polished R-plane Sapphire Wafers for SOS

R-plane Sapphire (1-102), 57.6 degrees to C-plane, is the preferred material for Silicon-on-Sapphire used in semiconductor, microwave and pressure transducer applications.

Typical applications for Silicon on Sapphire wafers include:

  • Fabrication of active topside Silicon-based devices
  • Fabrication of topside laser devices
  • Backside polishing of the SOS wafer to fabricate an optical device on the Silicon side
  • Etching off the Silicon side to utilize the Sapphire as a SEMI standard wafer, or wafer carrier

In Stock SOS Wafers

Please call or e-mail for details

  Parameter Value Tolerance ±
Sapphire Wafer Wafer Size 100mm 0.25mm
  Thickness 0.53mm 0.05mm
  Wafer flat Single  
  OF Length 32.5mm 2.5mm
  Projected C-Axis 45 Degrees 2 Degrees
  Flatness 10um Max.
  Parallelism 20um Max.
  Surface Roughness Ground - 64u" Ra  
  Sapphire Orientation R-Plane 2 Degrees
Silicon EPI Layer Silicon Orientation (100)  
  Silicon Thickness 0.6um 0.06um
  Resistivity > 100 ohm/cm Min.

Other Sapphire related web pages:

Return to Home Page: Sapphire wafers and sapphire substrates

Updated: 22 Jan 2009

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