Typical applications for Silicon on Sapphire wafers include:
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| Parameter | Value | Tolerance ± | |
|---|---|---|---|
| Sapphire Wafer | Wafer Size | 100mm | 0.25mm |
| Thickness | 0.53mm | 0.05mm | |
| Wafer flat | Single | ||
| OF Length | 32.5mm | 2.5mm | |
| Projected C-Axis | 45 Degrees | 2 Degrees | |
| Flatness | 10um | Max. | |
| Parallelism | 20um | Max. | |
| Surface Roughness | Ground - 64u" Ra | ||
| Sapphire Orientation | R-Plane | 2 Degrees | |
| Silicon EPI Layer | Silicon Orientation | (100) | |
| Silicon Thickness | 0.6um | 0.06um | |
| Resistivity | > 100 ohm/cm | Min. |
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C-Plane Sapphire Dicing Disco Dicing Sapphire
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Updated: 7 May 2008 |
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